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This is a highly integrated solution. It has 50/4 hopping channels and channel spacing of. The sensarray ยฎ automation in situ process management package provides a fast automated collection of process tool chamber temperature measurements while also providing semi. Klaโs sensarray ยฎ wafers provide a unique way โ not available through other means โ to monitor the effect of the process environment on semiconductor production. As such, we will present a couple of. User manual instruction guide for networked rfid sensor sensarray sensthys, inc. Setup instructions, pairing guide, and how to reset. Our list of downloads availible for working with the sensarray familiy. Sensarray user guide (video 1 and 2 for sensarray) a four part video introduction to the sensarray hardware and software. View these two videos and then jump down to view the. The sensarray can receive power through an ieee 802. 3af (poe) or ieee 802. 3at (poe+) compliant network on either of the ethernet ports. The sensarray can deliver power to an. This document includes information on how to install, operate, diagnose and fix issues with prosens (rfid console software) and sensthys readers. This document is highly. Sensarray automation provides productivity enhancements resulting from gains in process tool availability, more efficient use of engineering resources and centralized data storage in the.